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Fabrication of micro-structure on glass surface using micro-indentation and wet etching process
Fabrication of micro-structure on glass surface using micro-indentation and wet etching process
Fabrication of micro-structure on glass surface using micro-indentation and wet etching process
Saito, Y. (Autor:in) / Okamoto, S. (Autor:in) / Miki, A. (Autor:in) / Inomata, H. (Autor:in) / Hidaka, T. (Autor:in) / Kasai, H. (Autor:in)
APPLIED SURFACE SCIENCE ; 254 ; 7243-7249
01.01.2008
7 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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