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Fabrication of micro-structure on glass surface using micro-indentation and wet etching process

Saito, Y. / Okamoto, S. / Miki, A. / Inomata, H. / Hidaka, T. / Kasai, H.

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Fabrication of micro-structure on glass surface using micro-indentation and wet etching process

Saito, Y. / Okamoto, S. / Miki, A. / Inomata, H. / Hidaka, T. / Kasai, H.

Fabrication of micro-structure on glass surface using micro-indentation and wet etching process

Saito, Y. / Okamoto, S. / Miki, A. / Inomata, H. / Hidaka, T. / Kasai, H.

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Document information

Title:

Fabrication of micro-structure on glass surface using micro-indentation and wet etching process

Contributors:

Saito, Y. (author) / Okamoto, S. (author) / Miki, A. (author) / Inomata, H. (author) / Hidaka, T. (author) / Kasai, H. (author)

Published in:

APPLIED SURFACE SCIENCE ; 254 ; 7243-7249

Publication date:

2008-01-01

Size:

7 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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