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Quantitative SIMS measurement of high concentration of boron in silicon (up to 20at.%) using an isotopic comparative method
Quantitative SIMS measurement of high concentration of boron in silicon (up to 20at.%) using an isotopic comparative method
Quantitative SIMS measurement of high concentration of boron in silicon (up to 20at.%) using an isotopic comparative method
Dubois, C. (Autor:in) / Prudon, G. (Autor:in) / Gautier, B. (Autor:in) / Dupuy, J. C. (Autor:in)
APPLIED SURFACE SCIENCE ; 255 ; 1377-1380
01.01.2008
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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