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Quantitative SIMS measurement of high concentration of boron in silicon (up to 20at.%) using an isotopic comparative method
Quantitative SIMS measurement of high concentration of boron in silicon (up to 20at.%) using an isotopic comparative method
Quantitative SIMS measurement of high concentration of boron in silicon (up to 20at.%) using an isotopic comparative method
Dubois, C. (author) / Prudon, G. (author) / Gautier, B. (author) / Dupuy, J. C. (author)
APPLIED SURFACE SCIENCE ; 255 ; 1377-1380
2008-01-01
4 pages
Article (Journal)
English
DDC:
621.35
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