Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Post Metallization Annealing Characterization of Interface Properties of High- kappa Dielectrics Stack on Silicon Carbide
Post Metallization Annealing Characterization of Interface Properties of High- kappa Dielectrics Stack on Silicon Carbide
Post Metallization Annealing Characterization of Interface Properties of High- kappa Dielectrics Stack on Silicon Carbide
Weng, M.H. (Autor:in) / Mahapatra, R. (Autor:in) / Wright, N.G. (Autor:in) / Horsfall, A.B. (Autor:in)
MATERIALS SCIENCE FORUM ; 600/603 ; 771-774
01.01.2009
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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