Gate-Area Dependence of SiC Thermal Oxides Reliability

Senzaki, J. / Shimozato, A. / Okamoto, M. et al. | British Library Online Contents | 2009

Reliability of Gate Oxides on 4H-SiC Epitaxial Surface Planarized by CMP Treatment

Yamada, K. / Ishiyama, O. / Tamura, K. et al. | British Library Online Contents | 2014

Reliability study of ultra-thin gate oxides on strained-Si/SiGe MOS structures

Varzgar, J. B. / Kanoun, M. / Uppal, S. et al. | British Library Online Contents | 2006

Rapid thermal post-metallization annealing effect on thin gate oxides

Jeng, M.-J. / Lin, H.-S. / Hwu, J.-G. | British Library Online Contents | 1996

Gate Oxides Beyond SiO~2

Schlom, D.G. / Guha, S. / Datta, S. | British Library Online Contents | 2008