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Time-resolved measurements during backside dry etching of fused silica
Time-resolved measurements during backside dry etching of fused silica
Time-resolved measurements during backside dry etching of fused silica
Zimmer, K. (Autor:in) / Bohme, R. (Autor:in) / Vass, C. (Autor:in) / Hopp, B. (Autor:in)
APPLIED SURFACE SCIENCE ; 255 ; 9617-9621
01.01.2009
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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