Fracture Behavior of Single- and Polycrystalline Silicon Films for MEMS Applications

Son, D. I. / Kim, J. J. / Kwon, D. G. | British Library Online Contents | 2005

Characterization of Low Stress, Undoped LPCVD Polycrystalline SiC Films for MEMS Applications

Dunning, J. / Fu, X. A. / Mehregany, M. et al. | British Library Online Contents | 2006

Characterization of strength properties of thin polycrystalline silicon films for MEMS applications:

Boroch, R. / Wiaranowski, J. / Mueller-Fiedler, R. et al. | British Library Online Contents | 2007

Characterization of Polycrystalline SiC Thin Films for MEMS Applications using Surface Micromachined Devices

Dunning, J. / Fu, X. A. / Rajgopal, S. et al. | British Library Online Contents | 2004

Anisotropic microhardness in single-crystal and polycrystalline BaTiO~3

Park, E. T. / Routbort, J. L. / Li, Z. et al. | British Library Online Contents | 1998