Single Crystal and Polycrystalline 3C-SiC for MEMS Applications: Fid-Bau Portal

Single Crystal and Polycrystalline 3C-SiC for MEMS Applications

Henry, A. / Janzen, E. / Mastropaolo, E. / Cheung, R.

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Single Crystal and Polycrystalline 3C-SiC for MEMS Applications

Henry, A. / Janzen, E. / Mastropaolo, E. / Cheung, R.

Single Crystal and Polycrystalline 3C-SiC for MEMS Applications

Henry, A. / Janzen, E. / Mastropaolo, E. / Cheung, R.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Single Crystal and Polycrystalline 3C-SiC for MEMS Applications

Contributors:

Henry, A. (author) / Janzen, E. (author) / Mastropaolo, E. (author) / Cheung, R. (author)

Published in:

MATERIALS SCIENCE FORUM ; 615/617 ; 625-628

Publication date:

2009-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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