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Electrical and mechanical properties of layered gold-chromium thin films for ohmic contacts in RF-MEMS switches
Electrical and mechanical properties of layered gold-chromium thin films for ohmic contacts in RF-MEMS switches
Electrical and mechanical properties of layered gold-chromium thin films for ohmic contacts in RF-MEMS switches
Mulloni, V. (Autor:in) / Bartali, R. (Autor:in) / Colpo, S. (Autor:in) / Giacomozzi, F. (Autor:in) / Laidani, N. (Autor:in) / Margesin, B. (Autor:in)
01.01.2009
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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