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Electrical and mechanical properties of layered gold-chromium thin films for ohmic contacts in RF-MEMS switches
Electrical and mechanical properties of layered gold-chromium thin films for ohmic contacts in RF-MEMS switches
Electrical and mechanical properties of layered gold-chromium thin films for ohmic contacts in RF-MEMS switches
Mulloni, V. (author) / Bartali, R. (author) / Colpo, S. (author) / Giacomozzi, F. (author) / Laidani, N. (author) / Margesin, B. (author)
2009-01-01
5 pages
Article (Journal)
English
DDC:
620.11
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