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Al^+ Implanted 4H-SiC: Improved Electrical Activation and Ohmic Contacts
Al^+ Implanted 4H-SiC: Improved Electrical Activation and Ohmic Contacts
Al^+ Implanted 4H-SiC: Improved Electrical Activation and Ohmic Contacts
Nipoti, R. (Autor:in) / Hallen, A. (Autor:in) / Parisini, A. (Autor:in) / Moscatelli, F. (Autor:in) / Vantaggio, S. (Autor:in) / Lebedev, A.A. / Davydov, S.Y. / Ivanov, P.A. / Levinshtein, M.E.
01.01.2013
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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