Laser direct patterning of the T-shaped ITO electrode for high-efficiency alternative current plasma display panels

Li, Z. H. / Cho, E. S. / Kwon, S. J. | British Library Online Contents | 2010

Dry etching of zinc-oxide and indium-zinc-oxide in IBr and BI3 plasma chemistries

Lim, W. T. / Stafford, L. / Song, J. I. et al. | British Library Online Contents | 2007

Etching of Transparent and Conductive Indium Tin Oxide Films

Zhai, L. / Zhou, H. / Li, X. et al. | British Library Online Contents | 2014

High-density plasma etching of indium-zinc oxide films in Ar/Cl2 and Ar/CH4/H2 chemistries

Lim, W. T. / Stafford, L. / Song, J. I. et al. | British Library Online Contents | 2006

Comparison of plasma chemistries for the dry etching of bulk single-crystal zinc-oxide and rf-sputtered indium-zinc-oxide films

Lim, W. T. / Stafford, L. / Wright, J. S. et al. | British Library Online Contents | 2007