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Laser crystallization of amorphous silicon films investigated by Raman spectroscopy and atomic force microscopy
Laser crystallization of amorphous silicon films investigated by Raman spectroscopy and atomic force microscopy
Laser crystallization of amorphous silicon films investigated by Raman spectroscopy and atomic force microscopy
APPLIED SURFACE SCIENCE ; 256 ; 3453-3458
01.01.2010
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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