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Laser crystallization of amorphous silicon films investigated by Raman spectroscopy and atomic force microscopy
Laser crystallization of amorphous silicon films investigated by Raman spectroscopy and atomic force microscopy
Laser crystallization of amorphous silicon films investigated by Raman spectroscopy and atomic force microscopy
APPLIED SURFACE SCIENCE ; 256 ; 3453-3458
2010-01-01
6 pages
Article (Journal)
English
DDC:
621.35
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