Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Effect of Sputtering Power on the Nucleation and Growth of Cu Films Deposited by Magnetron Sputtering
Effect of Sputtering Power on the Nucleation and Growth of Cu Films Deposited by Magnetron Sputtering
Effect of Sputtering Power on the Nucleation and Growth of Cu Films Deposited by Magnetron Sputtering
Le, M.-T. (Autor:in) / Sohn, Y.-U. (Autor:in) / Lim, J.-W. (Autor:in) / Choi, G.-S. (Autor:in)
MATERIALS TRANSACTIONS ; 51 ; 116-120
01.01.2010
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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