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    Effect of Sputtering Power on the Nucleation and Growth of Cu Films Deposited by Magnetron Sputtering

    New search for: Le, M.-T.
    New search for: Sohn, Y.-U.
    New search for: Lim, J.-W.
    New search for: Choi, G.-S.

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    Effect of Sputtering Power on the Nucleation and Growth of Cu Films Deposited by Magnetron Sputtering

    New search for: Le, M.-T.
    New search for: Sohn, Y.-U.
    New search for: Lim, J.-W.
    New search for: Choi, G.-S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Effect of Sputtering Power on the Nucleation and Growth of Cu Films Deposited by Magnetron Sputtering

    New search for: Le, M.-T.
    New search for: Sohn, Y.-U.
    New search for: Lim, J.-W.
    New search for: Choi, G.-S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    Effect of Sputtering Power on the Nucleation and Growth of Cu Films Deposited by Magnetron Sputtering

    Contributors:

    Le, M.-T. (author) / Sohn, Y.-U. (author) / Lim, J.-W. (author) / Choi, G.-S. (author)

    Published in:

    MATERIALS TRANSACTIONS ; 51 ; 116-120

    Publication date:

    2010-01-01

    Size:

    5 pages

    ISSN:

    1345-9678

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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