Preparation of patterned GaAs structures for MEMS and MOEMS

Cambel, V. / Kicin, S. / Kuliffayova, M. et al. | British Library Online Contents | 2002

Technologies for Microdevice Packaging Packaging Requirements for MEMS and MOEMS

Pelzer, R. / Teomim, D. / Perlberg, G. et al. | British Library Online Contents | 2004

Fabrication of Self-Organized Titania Nanostructures on Glass by Combinational Anodizing Technology

Chu, S. Z. / Inoue, S. / Wada, K. et al. | British Library Conference Proceedings | 2006

Ultraviolet Laser-based MOEMS and MEMS Micromachining An Alternative to Wet Processing

Sercel, J. P. | British Library Online Contents | 2004

Electrical properties of laser-ablation-initiated self-organized nanostructures on silicon surface

Reif, J. / Ratzke, M. / Varlamova, O. et al. | British Library Online Contents | 2006