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Self-organized nanostructures in silicon and glass for MEMS, MOEMS and BioMEMS

Lilienthal, K. / Fischer, M. / Stubenrauch, M. / Schober, A.

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Self-organized nanostructures in silicon and glass for MEMS, MOEMS and BioMEMS

Lilienthal, K. / Fischer, M. / Stubenrauch, M. / Schober, A.

Self-organized nanostructures in silicon and glass for MEMS, MOEMS and BioMEMS

Lilienthal, K. / Fischer, M. / Stubenrauch, M. / Schober, A.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Self-organized nanostructures in silicon and glass for MEMS, MOEMS and BioMEMS

Contributors:

Lilienthal, K. (author) / Fischer, M. (author) / Stubenrauch, M. (author) / Schober, A. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B ADVANCED FUNCTIONAL SOLID STATE MATERIALS ; 169 ; 78-84

Publication date:

2010-01-01

Size:

7 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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