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Characterization of Defects in Semi-Insulating 6H-SiC Substrates Using IR Thermal Imaging Camera
Characterization of Defects in Semi-Insulating 6H-SiC Substrates Using IR Thermal Imaging Camera
Characterization of Defects in Semi-Insulating 6H-SiC Substrates Using IR Thermal Imaging Camera
Lee, K.Y. (Autor:in) / Miyazaki, H. (Autor:in) / Okamoto, Y. (Autor:in) / Morimoto, J. (Autor:in) / Bauer, A.J. / Friedrichs, P. / Krieger, M. / Pensl, G. / Rupp, R. / Seyller, T.
01.01.2010
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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