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New Generation of SiC Based Biodevices Implemented on 4'' Wafers
New Generation of SiC Based Biodevices Implemented on 4'' Wafers
New Generation of SiC Based Biodevices Implemented on 4'' Wafers
Godignon, P. (Autor:in) / Martin, I. (Autor:in) / Gabriel, G. (Autor:in) / Gomez, R. (Autor:in) / Placidi, M. (Autor:in) / Villa, R. (Autor:in) / Bauer, A.J. / Friedrichs, P. / Krieger, M. / Pensl, G.
Silicon Carbide and Related Materials 2009 ; 1097-1100
MATERIALS SCIENCE FORUM ; 645/648
01.01.2010
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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