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The reactive gas pulsing process for tuneable properties of sputter deposited titanium oxide, nitride and oxynitride coatings
The reactive gas pulsing process for tuneable properties of sputter deposited titanium oxide, nitride and oxynitride coatings
The reactive gas pulsing process for tuneable properties of sputter deposited titanium oxide, nitride and oxynitride coatings
Martin, N. (Autor:in) / Besnard, A. (Autor:in) / Sthal, F. (Autor:in) / Takadoum, J. (Autor:in) / Silva, F.S. / Soares, D.F. / Vaz, J.F.V.
01.01.2010
19 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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