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The preparation and evaluation of graded multilayer ta-C films deposited by FCVA method

Wang, G. G. / Zhang, H. Y. / Li, W. Y. / Yang, F. X. / Cui, L. / Zuo, H. B. / Han, J. C.

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The preparation and evaluation of graded multilayer ta-C films deposited by FCVA method

Wang, G. G. / Zhang, H. Y. / Li, W. Y. / Yang, F. X. / Cui, L. / Zuo, H. B. / Han, J. C.

The preparation and evaluation of graded multilayer ta-C films deposited by FCVA method

Wang, G. G. / Zhang, H. Y. / Li, W. Y. / Yang, F. X. / Cui, L. / Zuo, H. B. / Han, J. C.

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Titel:

The preparation and evaluation of graded multilayer ta-C films deposited by FCVA method

Beteiligte:

Wang, G. G. (Autor:in) / Zhang, H. Y. (Autor:in) / Li, W. Y. (Autor:in) / Yang, F. X. (Autor:in) / Cui, L. (Autor:in) / Zuo, H. B. (Autor:in) / Han, J. C. (Autor:in)

Erschienen in:

APPLIED SURFACE SCIENCE ; 257 ; 5064-5069

Erscheinungsdatum:

01.01.2011

Format / Umfang:

6 pages

ISSN:

0169-4332

Medientyp:

Aufsatz (Zeitschrift)

Format:

Sprache:

Englisch

Klassifikation:

DDC: 621.35

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