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The preparation and evaluation of graded multilayer ta-C films deposited by FCVA method

Wang, G. G. / Zhang, H. Y. / Li, W. Y. / Yang, F. X. / Cui, L. / Zuo, H. B. / Han, J. C.

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The preparation and evaluation of graded multilayer ta-C films deposited by FCVA method

Wang, G. G. / Zhang, H. Y. / Li, W. Y. / Yang, F. X. / Cui, L. / Zuo, H. B. / Han, J. C.

The preparation and evaluation of graded multilayer ta-C films deposited by FCVA method

Wang, G. G. / Zhang, H. Y. / Li, W. Y. / Yang, F. X. / Cui, L. / Zuo, H. B. / Han, J. C.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

The preparation and evaluation of graded multilayer ta-C films deposited by FCVA method

Contributors:

Wang, G. G. (author) / Zhang, H. Y. (author) / Li, W. Y. (author) / Yang, F. X. (author) / Cui, L. (author) / Zuo, H. B. (author) / Han, J. C. (author)

Published in:

APPLIED SURFACE SCIENCE ; 257 ; 5064-5069

Publication date:

2011-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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