Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Atomic layer deposition of HfO~2 investigated in situ by means of a noncontact atomic force microscopy
Atomic layer deposition of HfO~2 investigated in situ by means of a noncontact atomic force microscopy
Atomic layer deposition of HfO~2 investigated in situ by means of a noncontact atomic force microscopy
Kolanek, K. (Autor:in) / Tallarida, M. (Autor:in) / Schmeisser, D. (Autor:in)
MATERIALS SCIENCE -WROCLAW- ; 28 ; 731-740
01.01.2010
10 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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