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Annealing ambient on the evolution of He-induced voids in silicon
Annealing ambient on the evolution of He-induced voids in silicon
Annealing ambient on the evolution of He-induced voids in silicon
Li, B. S. (Autor:in) / Zhang, C. H. (Autor:in) / Zhong, Y. R. (Autor:in) / Wang, D. N. (Autor:in) / Zhou, L. H. (Autor:in) / Yang, Y. T. (Autor:in) / Zhang, L. Q. (Autor:in) / Zhang, H. H. (Autor:in) / Zhang, Y. (Autor:in) / Han, L. H. (Autor:in)
APPLIED SURFACE SCIENCE ; 257 ; 7036-7040
01.01.2011
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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