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4H-SiC Homoepitaxial Growth on Substrates with Different Off-Cut Directions
4H-SiC Homoepitaxial Growth on Substrates with Different Off-Cut Directions
4H-SiC Homoepitaxial Growth on Substrates with Different Off-Cut Directions
Kallinger, B. (Autor:in) / Thomas, B. (Autor:in) / Berwian, P. (Autor:in) / Friedrich, J. (Autor:in) / Trachta, G. (Autor:in) / Weber, A.D. (Autor:in) / Monakhov, E.V. / Hornos, T. / Svensson, B.G.
01.01.2011
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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