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4H-SiC Homoepitaxial Growth on Substrates with Different Off-Cut Directions
4H-SiC Homoepitaxial Growth on Substrates with Different Off-Cut Directions
4H-SiC Homoepitaxial Growth on Substrates with Different Off-Cut Directions
Kallinger, B. (author) / Thomas, B. (author) / Berwian, P. (author) / Friedrich, J. (author) / Trachta, G. (author) / Weber, A.D. (author) / Monakhov, E.V. / Hornos, T. / Svensson, B.G.
2011-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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