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    Structural, optical and electrical properties of amorphous silicon thin films prepared by sputtering with different targets

    New search for: Qin, Y.
    New search for: Feng, T.
    New search for: Li, Z.
    New search for: Sun, Z.

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    Structural, optical and electrical properties of amorphous silicon thin films prepared by sputtering with different targets

    New search for: Qin, Y.
    New search for: Feng, T.
    New search for: Li, Z.
    New search for: Sun, Z.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Structural, optical and electrical properties of amorphous silicon thin films prepared by sputtering with different targets

    New search for: Qin, Y.
    New search for: Feng, T.
    New search for: Li, Z.
    New search for: Sun, Z.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Structural, optical and electrical properties of amorphous silicon thin films prepared by sputtering with different targets

    Contributors:

    Qin, Y. (author) / Feng, T. (author) / Li, Z. (author) / Sun, Z. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 257 ; 7993-7996

    Publication date:

    2011-01-01

    Size:

    4 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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