Mechanical Testing of Polysilicon Thin Films with the ISDGy

Yuan, B. / Sharpe, W. N. | British Library Online Contents | 1997

Relating mechanical testing and microstructural features of polysilicon thin films

Jayaraman, S. / Edwards, R. L. / Hemker, K. J. | British Library Online Contents | 1999

Characterisation of semi-insulating polysilicon oxygen doped silicon thin films

Lynch, S. / Greef, R. / Stoemenos, J. et al. | British Library Online Contents | 1995

Size effect on the mechanical properties of microfabricated polysilicon thin films

Ding, J. N. / Meng, Y. G. / Wen, S. Z. | British Library Online Contents | 2001

Rapid thermal oxidation of highly in situ phosphorus doped polysilicon thin films

Kallel, S. / Semmache, B. / Lemiti, M. et al. | British Library Online Contents | 1998