Mechanical Testing of Polysilicon Thin Films with the ISDGy

Yuan, B. / Sharpe, W. N. | British Library Online Contents | 1997

Relating mechanical testing and microstructural features of polysilicon thin films

Jayaraman, S. / Edwards, R. L. / Hemker, K. J. | British Library Online Contents | 1999

Overall elastic domain of thin polysilicon films

Mariani, S. / Martini, R. / Corigliano, A. et al. | British Library Online Contents | 2011

Evaluation of Mechanical Properties and Strain Criterion for Realibility Design of Micromachined Polysilicon Thin Films

Ding, J.-N. | British Library Online Contents | 2002

Specimen size effect on mechanical properties of polysilicon microcantilever beams measured by deflection using a nanoindenter

Ding, J. N. / Meng, Y. G. / Wen, S. Z. | British Library Online Contents | 2001