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Characterization of the deflection of a new epitaxial piezoelectric micro-mirror: Modeling and experiment
Characterization of the deflection of a new epitaxial piezoelectric micro-mirror: Modeling and experiment
Characterization of the deflection of a new epitaxial piezoelectric micro-mirror: Modeling and experiment
Matin, M. A. (Autor:in) / Akai, D. (Autor:in) / Kawazu, N. (Autor:in) / Hanebuchi, M. (Autor:in) / Sawada, K. (Autor:in) / Ishida, M. (Autor:in)
01.01.2010
7 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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