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    Characterization of the deflection of a new epitaxial piezoelectric micro-mirror: Modeling and experiment

    New search for: Matin, M. A.
    New search for: Akai, D.
    New search for: Kawazu, N.
    New search for: Hanebuchi, M.
    New search for: Sawada, K.
    New search for: Ishida, M.

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    Characterization of the deflection of a new epitaxial piezoelectric micro-mirror: Modeling and experiment

    New search for: Matin, M. A.
    New search for: Akai, D.
    New search for: Kawazu, N.
    New search for: Hanebuchi, M.
    New search for: Sawada, K.
    New search for: Ishida, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Characterization of the deflection of a new epitaxial piezoelectric micro-mirror: Modeling and experiment

    New search for: Matin, M. A.
    New search for: Akai, D.
    New search for: Kawazu, N.
    New search for: Hanebuchi, M.
    New search for: Sawada, K.
    New search for: Ishida, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Characterization of the deflection of a new epitaxial piezoelectric micro-mirror: Modeling and experiment

    Contributors:

    Matin, M. A. (author) / Akai, D. (author) / Kawazu, N. (author) / Hanebuchi, M. (author) / Sawada, K. (author) / Ishida, M. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING B ADVANCED FUNCTIONAL SOLID STATE MATERIALS ; 175 ; 129-135

    Publication date:

    2010-01-01

    Size:

    7 pages

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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