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On-Chip Temperature-Control Technology for Silicon Micro-Gyroscope
On-Chip Temperature-Control Technology for Silicon Micro-Gyroscope
On-Chip Temperature-Control Technology for Silicon Micro-Gyroscope
Xu, L. (Autor:in) / Yang, B. (Autor:in) / Wang, S.R. (Autor:in) / Li, H.S. (Autor:in) / Huang, L.B. (Autor:in)
KEY ENGINEERING MATERIALS ; 483 ; 228-231
01.01.2011
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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