A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
On-Chip Temperature-Control Technology for Silicon Micro-Gyroscope
On-Chip Temperature-Control Technology for Silicon Micro-Gyroscope
On-Chip Temperature-Control Technology for Silicon Micro-Gyroscope
Xu, L. (author) / Yang, B. (author) / Wang, S.R. (author) / Li, H.S. (author) / Huang, L.B. (author)
KEY ENGINEERING MATERIALS ; 483 ; 228-231
2011-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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