Preparation of monodisperse polystyrene/silica core-shell nano-composite abrasive with controllable size and its chemical mechanical polishing performance on copper: Fid-Bau Portal

Preparation of monodisperse polystyrene/silica core-shell nano-composite abrasive with controllable size and its chemical mechanical polishing performance on copper

Zhang, L. / Wang, H. / Zhang, Z. / Qin, F. / Liu, W. / Song, Z.

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Preparation of monodisperse polystyrene/silica core-shell nano-composite abrasive with controllable size and its chemical mechanical polishing performance on copper

Zhang, L. / Wang, H. / Zhang, Z. / Qin, F. / Liu, W. / Song, Z.

Preparation of monodisperse polystyrene/silica core-shell nano-composite abrasive with controllable size and its chemical mechanical polishing performance on copper

Zhang, L. / Wang, H. / Zhang, Z. / Qin, F. / Liu, W. / Song, Z.

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Zugriff über TIB

Verfügbarkeit in meiner Bibliothek prüfen

Bestellung bei Subito €

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Titel:

Preparation of monodisperse polystyrene/silica core-shell nano-composite abrasive with controllable size and its chemical mechanical polishing performance on copper

Beteiligte:

Zhang, L. (Autor:in) / Wang, H. (Autor:in) / Zhang, Z. (Autor:in) / Qin, F. (Autor:in) / Liu, W. (Autor:in) / Song, Z. (Autor:in)

Erschienen in:

APPLIED SURFACE SCIENCE ; 258 ; 1217-1224

Erscheinungsdatum:

01.01.2011

Format / Umfang:

8 pages

ISSN:

0169-4332

Medientyp:

Aufsatz (Zeitschrift)

Format:

Sprache:

Englisch

Klassifikation:

DDC: 621.35

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