Preparation of monodisperse polystyrene/silica core-shell nano-composite abrasive with controllable size and its chemical mechanical polishing performance on copper: Fid-Bau Portal

Preparation of monodisperse polystyrene/silica core-shell nano-composite abrasive with controllable size and its chemical mechanical polishing performance on copper

Zhang, L. / Wang, H. / Zhang, Z. / Qin, F. / Liu, W. / Song, Z.

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Preparation of monodisperse polystyrene/silica core-shell nano-composite abrasive with controllable size and its chemical mechanical polishing performance on copper

Zhang, L. / Wang, H. / Zhang, Z. / Qin, F. / Liu, W. / Song, Z.

Preparation of monodisperse polystyrene/silica core-shell nano-composite abrasive with controllable size and its chemical mechanical polishing performance on copper

Zhang, L. / Wang, H. / Zhang, Z. / Qin, F. / Liu, W. / Song, Z.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Preparation of monodisperse polystyrene/silica core-shell nano-composite abrasive with controllable size and its chemical mechanical polishing performance on copper

Contributors:

Zhang, L. (author) / Wang, H. (author) / Zhang, Z. (author) / Qin, F. (author) / Liu, W. (author) / Song, Z. (author)

Published in:

APPLIED SURFACE SCIENCE ; 258 ; 1217-1224

Publication date:

2011-01-01

Size:

8 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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