Ultrathin Direct Atomic Layer Deposition on Composite Electrodes for Highly Durable and Safe Li-Ion Batteries

Jung, Y. S. / Cavanagh, A. S. / Riley, L. A. et al. | British Library Online Contents | 2010

Hafnium silicon oxide films prepared by atomic layer deposition

Kukli, K. / Ritala, M. / Leskela, M. et al. | British Library Online Contents | 2004

Optimal sidewall functionalization for the growth of ultrathin TiO2 nanotubes via atomic layer deposition

Dominguez, D. / Borbón-Nuñez, H. A. / Romo-Herrera, J. M. et al. | British Library Online Contents | 2018

Properties of ultrathin platinum deposited by atomic layer deposition for nanoscale copper-metallization schemes

Zhu, Y. / Dunn, K. A. / Kaloyeros, A. E. | British Library Online Contents | 2007

Atomic layer deposition of tantalum nitride for ultrathin liner applications in advanced copper metallization schemes

van der Straten, O. / Zhu, Y. / Dunn, K. et al. | British Library Online Contents | 2004