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Thermal stability of magnetron sputtered amorphous Si2C
Thermal stability of magnetron sputtered amorphous Si2C
Thermal stability of magnetron sputtered amorphous Si2C
Gustus, R. (Autor:in) / Gruber, W. (Autor:in) / Wegewitz, L. (Autor:in) / Schmidt, H. (Autor:in) / Maus-Friedrichs, W. (Autor:in)
APPLIED SURFACE SCIENCE ; 258 ; 5567-5573
01.01.2012
7 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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