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Thermal stability of magnetron sputtered amorphous Si2C

Gustus, R. / Gruber, W. / Wegewitz, L. / Schmidt, H. / Maus-Friedrichs, W.

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Thermal stability of magnetron sputtered amorphous Si2C

Gustus, R. / Gruber, W. / Wegewitz, L. / Schmidt, H. / Maus-Friedrichs, W.

Thermal stability of magnetron sputtered amorphous Si2C

Gustus, R. / Gruber, W. / Wegewitz, L. / Schmidt, H. / Maus-Friedrichs, W.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Thermal stability of magnetron sputtered amorphous Si2C

Contributors:

Gustus, R. (author) / Gruber, W. (author) / Wegewitz, L. (author) / Schmidt, H. (author) / Maus-Friedrichs, W. (author)

Published in:

APPLIED SURFACE SCIENCE ; 258 ; 5567-5573

Publication date:

2012-01-01

Size:

7 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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