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Thermal stability of magnetron sputtered amorphous Si2C
Thermal stability of magnetron sputtered amorphous Si2C
Thermal stability of magnetron sputtered amorphous Si2C
Gustus, R. (author) / Gruber, W. (author) / Wegewitz, L. (author) / Schmidt, H. (author) / Maus-Friedrichs, W. (author)
APPLIED SURFACE SCIENCE ; 258 ; 5567-5573
2012-01-01
7 pages
Article (Journal)
English
DDC:
621.35
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