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Preparation and tribological characterization of amorphous carbon nitride coatings in a RF PECVD-DC PVD hybrid coating process
Preparation and tribological characterization of amorphous carbon nitride coatings in a RF PECVD-DC PVD hybrid coating process
Preparation and tribological characterization of amorphous carbon nitride coatings in a RF PECVD-DC PVD hybrid coating process
Wang, P. (Autor:in) / Takeno, T. (Autor:in) / Adachi, K. (Autor:in) / Miki, H. (Autor:in) / Takagi, T. (Autor:in)
APPLIED SURFACE SCIENCE ; 258 ; 6576-6582
01.01.2012
7 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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