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    Preparation and tribological characterization of amorphous carbon nitride coatings in a RF PECVD-DC PVD hybrid coating process

    New search for: Wang, P.
    New search for: Takeno, T.
    New search for: Adachi, K.
    New search for: Miki, H.
    New search for: Takagi, T.

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    Preparation and tribological characterization of amorphous carbon nitride coatings in a RF PECVD-DC PVD hybrid coating process

    New search for: Wang, P.
    New search for: Takeno, T.
    New search for: Adachi, K.
    New search for: Miki, H.
    New search for: Takagi, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Preparation and tribological characterization of amorphous carbon nitride coatings in a RF PECVD-DC PVD hybrid coating process

    New search for: Wang, P.
    New search for: Takeno, T.
    New search for: Adachi, K.
    New search for: Miki, H.
    New search for: Takagi, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Preparation and tribological characterization of amorphous carbon nitride coatings in a RF PECVD-DC PVD hybrid coating process

    Contributors:

    Wang, P. (author) / Takeno, T. (author) / Adachi, K. (author) / Miki, H. (author) / Takagi, T. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 258 ; 6576-6582

    Publication date:

    2012-01-01

    Size:

    7 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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