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Laser Induced Backside Dry Etching of BK-7 and Quartz in Vacuum
Laser Induced Backside Dry Etching of BK-7 and Quartz in Vacuum
Laser Induced Backside Dry Etching of BK-7 and Quartz in Vacuum
Hamdani, A.H. (Autor:in) / Ansar, A. (Autor:in) / Akhter, R. (Autor:in) / Aslam, M. (Autor:in)
KEY ENGINEERING MATERIALS ; 510/511 ; 261-264
01.01.2012
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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