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Laser Induced Backside Dry Etching of BK-7 and Quartz in Vacuum
Laser Induced Backside Dry Etching of BK-7 and Quartz in Vacuum
Laser Induced Backside Dry Etching of BK-7 and Quartz in Vacuum
Hamdani, A.H. (author) / Ansar, A. (author) / Akhter, R. (author) / Aslam, M. (author)
KEY ENGINEERING MATERIALS ; 510/511 ; 261-264
2012-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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