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High Dose Al^+ Implanted and Microwave Annealed 4H-SiC
High Dose Al^+ Implanted and Microwave Annealed 4H-SiC
High Dose Al^+ Implanted and Microwave Annealed 4H-SiC
Nipoti, R. (Autor:in) / Nath, A. (Autor:in) / Rao, M.V. (Autor:in) / Hallen, A. (Autor:in) / Mancarella, F. (Autor:in) / Zampolli, S. (Autor:in) / Tian, Y.L. (Autor:in)
MATERIALS SCIENCE FORUM ; 717/720 ; 817-820
01.01.2012
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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