High Dose Al^+ Implanted and Microwave Annealed 4H-SiC: Fid-Bau Portal

High Dose Al^+ Implanted and Microwave Annealed 4H-SiC

Nipoti, R. / Nath, A. / Rao, M.V. / Hallen, A. / Mancarella, F. / Zampolli, S. / Tian, Y.L.

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High Dose Al^+ Implanted and Microwave Annealed 4H-SiC

Nipoti, R. / Nath, A. / Rao, M.V. / Hallen, A. / Mancarella, F. / Zampolli, S. / Tian, Y.L.

High Dose Al^+ Implanted and Microwave Annealed 4H-SiC

Nipoti, R. / Nath, A. / Rao, M.V. / Hallen, A. / Mancarella, F. / Zampolli, S. / Tian, Y.L.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

High Dose Al^+ Implanted and Microwave Annealed 4H-SiC

Contributors:

Nipoti, R. (author) / Nath, A. (author) / Rao, M.V. (author) / Hallen, A. (author) / Mancarella, F. (author) / Zampolli, S. (author) / Tian, Y.L. (author)

Published in:

MATERIALS SCIENCE FORUM ; 717/720 ; 817-820

Publication date:

2012-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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Narita, K. / Hijikata, Y. / Yaguchi, H. et al. | British Library Online Contents | 2004

XPS depth profiling of laser-annealed Zn^+-implanted GaAs

Marinova, T. / Kakanakova-Georgieva, A. / Kalitzova, M. et al. | British Library Online Contents | 1997

Structural Defects Formed in Al-Implanted and Annealed 4H-SiC

Jones, K. A. / Zheleva, T. S. / Kulkarni, V. N. et al. | British Library Online Contents | 2004

Surface morphologies of excimer-laser annealed BF2+ implanted Si diodes

Burtsev, A. / Schut, H. / Nanver, L. K. et al. | British Library Online Contents | 2004