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Focused Ion-Beam (FIB) Nanomachining of Silicon Carbide (SiC) Stencil Masks for Nanoscale Patterning
Focused Ion-Beam (FIB) Nanomachining of Silicon Carbide (SiC) Stencil Masks for Nanoscale Patterning
Focused Ion-Beam (FIB) Nanomachining of Silicon Carbide (SiC) Stencil Masks for Nanoscale Patterning
Zamani, H. (Autor:in) / Lee, S.W. (Autor:in) / Avishai, A. (Autor:in) / Zorman, C.A. (Autor:in) / Sankaran, R.M. (Autor:in) / Feng, P.X.L. (Autor:in)
MATERIALS SCIENCE FORUM ; 717/720 ; 889-892
01.01.2012
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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