Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Key technique for texturing a uniform pyramid structure with a layer of silicon nitride on monocrystalline silicon wafer
Key technique for texturing a uniform pyramid structure with a layer of silicon nitride on monocrystalline silicon wafer
Key technique for texturing a uniform pyramid structure with a layer of silicon nitride on monocrystalline silicon wafer
Huang, B. R. (Autor:in) / Yang, Y. K. (Autor:in) / Yang, W. L. (Autor:in)
APPLIED SURFACE SCIENCE ; 266 ; 245-249
01.01.2013
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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