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Key technique for texturing a uniform pyramid structure with a layer of silicon nitride on monocrystalline silicon wafer
Key technique for texturing a uniform pyramid structure with a layer of silicon nitride on monocrystalline silicon wafer
Key technique for texturing a uniform pyramid structure with a layer of silicon nitride on monocrystalline silicon wafer
Huang, B. R. (author) / Yang, Y. K. (author) / Yang, W. L. (author)
APPLIED SURFACE SCIENCE ; 266 ; 245-249
2013-01-01
5 pages
Article (Journal)
English
DDC:
621.35
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