Vertical Transistor with Ultrathin Silicon Nitride Gate Dielectric

Moradi, M. / Nathan, A. / Haverinen, H. M. et al. | British Library Online Contents | 2009

Epitaxial aluminium nitride on patterned silicon

Moreno, J. C. / Frayssinet, E. / Semond, F. et al. | British Library Online Contents | 2009

Sputtering Preparation of Silicon Nitride Thin Films for Gate Dielectric Applications

Pereira, L. / Aguas, H. / Igreja, R. et al. | British Library Online Contents | 2004

Gate dielectric properties of silicon nitride films formed by jet vapor deposition

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Epitaxial growth of asymmetric -silicon nitride nanocombs

Wang, Q. / Cui, Q. / Zhu, P. et al. | British Library Online Contents | 2010